COURSE UNIT TITLE

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

ASISTANT PROFESSOR IŞIL BIRLIK

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering

Course Objective

The aim of this course is to introduce the central concepts of nanolithography, provide an explanation of the fundamental principles and example applications of nanolithography techniques. Course covers first traditional techniques, including electron beam lithography, focused ion beam, plasma-assisted pattern transfer, optical lithography, and soft x-ray lithography. Then describes new and emerging methods, such as nanoimprint lithography, scanning probe lithography, two-photon lithography, self assembly, plasmonic nanolithography, and deterministic doping. Finally discusses how nanofabrication processes are used in electronics.

Learning Outcomes of the Course Unit

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Recomended or Required Reading

Nano-lithography, Stefan Landis, Wiley.
Nanofabrication: Techniques and Principles, Stepanova, Maria; Dew, Steven, Springer.

Planned Learning Activities and Teaching Methods

Lectures with presentations, mid-term and final exam, student group studies and presentations.

Assessment Methods

Further Notes About Assessment Methods

None

Assessment Criteria

All learning outcomes will be assessed with mid-term and final exam, student presentations.

Language of Instruction

Turkish

Course Policies and Rules

To be announced.

Contact Details for the Lecturer(s)

Asist. Prof. Dr. Işıl BIRLIK
Dokuz Eylul University
Faculty of Engineering
Department of Metallurgy and Materials Engineering
Tinaztepe Campus Buca IZMIR

Office Hours

Will be announced during the semestre.

Work Placement(s)

None

Workload Calculation

Contribution of Learning Outcomes to Programme Outcomes