COURSE UNIT TITLE

: NANOMETROLOGY - II

DEGREE PROGRAMMES

Description of Individual Course Units

Course Unit Code Course Unit Title Type Of Course D U L ECTS
NNE 5024 NANOMETROLOGY - II ELECTIVE 3 0 0 8

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

PROFESSOR EVREN MELTEM TOYGAR

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering

Course Objective

Nanomanufacturing is a process of using precision machines that can generate precision tool motions to fabricate designed surface forms/dimensions with nanometric tolerances. Dimensional measurement of the workpiece and the machine is always an essential process for the purpose of quality control in all kinds of manufacturing. Because accuracy is the most important requirement for nanomanufacturing, the dimensional measurement is a much more crucial process for nanomanufacturing than other kinds of manufacturing. This course will provide the student with the underlying principles and techniques of nanometrology with emphasis on their application to production with nanotechnology.

In this course will be realized the laboratory practices for the contents of course nanometrology 1.

Learning Outcomes of the Course Unit

1   To give the laboratory practice of the dimensional measurement and importance of the accuracy in the production with nanotechnology
2   To give the laboratory practice of the measurement with angle sensor and laser technologies in the production with nanotechnology
3   To give the laboratory practice of the measurement of In-plane Motion in the production with nanotechnology
4   To give the laboratory practice of the measurement of Micro-dimensions in the production with nanotechnology
5   To give the laboratory practice of the measurement of 3D Nanostructures in the production with nanotechnology
6   To give the laboratory practice of scanning Image-sensor System for Measurement of Micro-dimensions in the production with nanotechnology

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Week Subject Description
1 Laboratory practice of Angle Sensor for Measurement of Surface Slope and Tilt Motion
2 Laboratory practice of Laser Autocollimator for Measurement of Multi-axis Tilt Motion
3 Laboratory practice of Surface Encoder for Measurement of In-plane Motion
4 Laboratory practice of Grating Encoder for Measurement of In-plane and Out-of-plane Motion
5 Laboratory practice of Scanning Multi-probe System for Measurement of Roundness
6 Laboratory practice of Scanning Error Separation System for Measurement of Straightness
7 Laboratory practice of Scanning Micro-stylus System for Measurement of Micro-aspherics
8 Laboratory practice of Large Area Scanning Probe Microscope for Micro-textured Surfaces
9 Laboratory practice of Large Area Scanning Probe Microscope for Micro-textured Surfaces
10 Midterm Exam
11 Laboratory practice of Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures
12 Project presentation
13 Project presentation
14 Project presentation

Recomended or Required Reading

Gao, Wei, Precision Nanometrology Sensors and Measuring
Systems for Nanomanufacturing Springer London Dordrecht Heidelberg New York, 2010.

Planned Learning Activities and Teaching Methods

The course is taught in a lecture, class presentation and discussion format. All class members are expected to attend and both the lecture and take part in the discussion sessions. Besides the taught lecture, group presentations are to be prepared by the groups assigned for that week and presented to open a discussion session.

Assessment Methods

SORTING NUMBER SHORT CODE LONG CODE FORMULA
1 MTE MIDTERM EXAM
2 PRJ PROJECT
3 FIN FINAL EXAM
4 FCG FINAL COURSE GRADE MTE * 0.35 + PRJ * 0.15 + FIN * 0.50
5 RST RESIT
6 FCGR FINAL COURSE GRADE (RESIT) MTE * 0.35 + PRJ * 0.15 + RST * 0.50


Further Notes About Assessment Methods

None

Assessment Criteria

There will be minimum 2 projects, averaged out grades for which will be 15 % of the overall success of the students. mid-term examinations will be averaged and affect the grade by 35 %. Final exam will be 50 % of the resulting grade.

Language of Instruction

English

Course Policies and Rules

To be announced.

Contact Details for the Lecturer(s)

evren.toygar@deu.edu.tr

Office Hours

To be announced.

Work Placement(s)

None

Workload Calculation

Activities Number Time (hours) Total Work Load (hours)
Lectures 12 3 36
Preparation before/after weekly lectures 12 3 36
Preparation for Mid-term Exam 2 10 20
Preparation for Final Exam 1 10 10
Preparing Individual Assignments 1 10 10
Preparing Project Presentation 3 20 60
Office hours 12 2 24
Final 1 2 2
Mid-term exam 1 2 2
TOTAL WORKLOAD (hours) 200

Contribution of Learning Outcomes to Programme Outcomes

PO/LOPO.1PO.2PO.3PO.4PO.5PO.6PO.7
LO.11452341
LO.22241123
LO.34121512
LO.45312451
LO.51223121
LO.62515252

CONTACT INFORMATION
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Phone: +90(232) 412 12 12 - Fax: +90 (232) 464 81 35

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